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CFD-PLASMA-2002

	Posted Mon April 01, 2002 @02:20PM
	CFDRC, world leader in computational fluid dynamics and plasma simulations, announces the release of CFD-PLASMA-2002, a comprehensive software tool for plasma engineering. CFD-PLASMA-2002 offers: Comprehensive fluid model for 3D simulations of Inductively Coupled Plasmas (ICP), Capacitively Coupled Plasmas (CCP) and direct current (DC) discharges for a variety of applications that include pulsed, atmospheric and multi-frequency discharges Full 3D Maxwell solver and advanced Filament model for simulations of electromagnetic fields in complex coil configurations in time and frequency domains Deterministic Boltzmann solver for simulations of non-local Electron Energy Distribution Functions (EEDF) and electron induced reaction rates Enhanced Chemistry Models and Expanded Database for Gas Mixtures commonly used in Semiconductor Manufacturing Interface to feature scale simulators SPEEDIE and EVOLVE for semiconductor manufacturing applications Expanded set of eight tutorials and a dozen of demonstration problems for a variety of applications including semiconductor manufacturing, lighting, feature scale etch, multi-frequency CCP, Plasma Display Panels, and thermal plasmas (arcs & torches) Interface to Matematica 4 -for advanced analysis and post-processing of results

	Bundled with a new set of extended tutorial materials, the software can be used for CAD of Industrial Plasma Systems and as a supplement for University based undergraduate or graduate classes on Plasma Engineering. CFDRC had developed a comprehensive set of plasma engineering training materials that utilize CFD-PLASMA and include some 16 case studies and plasma engineering and modeling theory overview. CFDRC also offers advanced Plasma Course for Industrial Engineers based on CFD-PLASMA2002. Current Research and Development efforts focus on: Magnetic field effects on electron transport (code development: implement tensor properties for electron mobility and diffusion) Monte Carlo module for ions and neutrals for advanced pre-sheath models and feature scale simulations Electron Boltzmann solver fully coupled with other modules for ICP, CCP & DC simulations Beta release of the elliptic solver Interface to SPICE for external circuit simulations coupled with reactor scale simulations Expanded Property Databases and Plasma Chemistry Libraries Coupled solvers (Poisson, n_e and T_e solved simultaneously for CCP simulations – electron inertia effects) Plasma radiation transport module development Kinetic module applied to simulations of electron transport in semiconductors Consolidate electrostatic module (div sigma grad phi = 0 and div eps grad phi = q solved simultaneously for simulations of conductors and insulators) Thermal plasmas. Plasma arc validation studies and demos .

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